Microstructuring of Su-8
نویسندگان
چکیده
Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported. The SU-8 processing technology was standardized for the purpose. Micro-pillars were fabricated on SU-8 polymer by soft lithographic technique. Micro-needles were realized on SU-8 film utilizing lensing effect of the etched groove structure of the glass substrate. Micro-channel was fabricated by molding of PDMS polymer on patterned SU-8 ridge structure. Structural characterization of the fabricated structures were investigated using optical microscope and SEM.
منابع مشابه
SU-8 as a Material for Microfabricated Particle Physics Detectors
Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some em...
متن کاملSynchrotron Radiation for On-chip Mid-ir Detection at the Diffraction Limit
Microchips for rapid mixing of two aqueous streams have been produced using CaF2 wafers and SU-8 microstructuring technology and tested at the IR beamline of Bessy II in Berlin, Germany. Advantage of the synchrotron radiation over thermal globar sources for measuring at sample spots close to the diffraction limit of the employed mid-IR radiation have been documented. The capability of the exper...
متن کاملA self-assembled monolayer-assisted surface microfabrication and release technique
This paper describes a method of thin film and MEMS processing which uses self-assembled monolayers as ultra-thin organic surface coating to enable a simple removal of microfabricated devices off the surface without wet chemical etching. A 1.5-nm thick self-assembled monolayer of dodecyltrichlorosilane reduces the adhesion between the SiO substrate surface 2 and a 100-nm thick evaporated alumin...
متن کاملLaser Surface Microstructuring of Biocompatible Materials Using a Microlens Array and the Talbot Effect: Evaluation of the Cell Adhesion
A laser based technique for microstructuring titanium and tantalum substrates using the Talbot effect and an array of microlenses is presented. By using this hybrid technique; we are able to generate different patterns and geometries on the top surfaces of the biomaterials. The Talbot effect allows us to rapidly make microstructuring, solving the common problems of using microlenses for multipa...
متن کاملElectrochemical Micromachining as an Enabling Technology for Advanced Silicon Microstructuring
Based on previous theoretical and experimental results on the electrochemical etching of silicon in HF-based aqueous electrolytes, it is shown for the first time that silicon microstructures of various shapes and silicon microsystems of high complexity can be effectively fabricated in any research lab with sub-micrometer accuracy and high aspect ratio values (about 100). This is well beyond any...
متن کامل